设备备件Spare Parts
| PN | 描述Description |
|---|---|
| 4S587-288 | Yaskawa XU-DL1910Yaskawa XU-DL1910 |
| 4S586-561-4 | Yaskawa XU-DV0704Z 直线电机控制器Yaskawa XU-DV0704Z Linear Motor Controller |
| STP Edwards STP-A2203W1-U Turbomolecular Pump TEL 3D80-000300-V2 Tested Working | STP Edwards STP-A2203W1-U Turbomolecular Pump TEL 3D80-000300-V2 Tested WorkingSTP Edwards STP-A2203W1-U Turbomolecular Pump TEL 3D80-000300-V2 Tested Working |
| P/N | DescriptionDescription |
| 4B001-418AN | BEARING SEPARATOR, FLAT-TYPE Y UNITBEARING SEPARATOR, FLAT-TYPE Y UNIT |
| 4B001-419AN | BEARING SEPARATOR, V-TYPE Y UNITBEARING SEPARATOR, V-TYPE Y UNIT |
| 4B004-761AN | POSITIONING PIN UNITPOSITIONING PIN UNIT |
| 4B004-762-1AN | PREALIGNMENT ROLLER UNITPREALIGNMENT ROLLER UNIT |
| 4B004-763AN | POSITIONING PINPOSITIONING PIN |
| 4B004-764AN | PREALIGNMENT ROLLER UNITPREALIGNMENT ROLLER UNIT |
| 4B006-100-1AN | AIR POT UNITAIR POT UNIT |
| 4B007-227BN | TURNTABLE VAC TOPTURNTABLE VAC TOP |
| 4B007-677AN | TRANSFER ARMTRANSFER ARM |
| 4B007-680AN | ROTATION ARMROTATION ARM |
| 4B008-564AN | CERAMIC ARMCERAMIC ARM |
| 4B010-059AN | SU,SD CARRIERSU,SD CARRIER |
| 4B013-322AN | CENTER UP/DOWN VACUUM TOPCENTER UP/DOWN VACUUM TOP |
| 4B014-889AN | ROBOT ARMROBOT ARM |
| 4B015-222AN | ROBOT ARM UNITROBOT ARM UNIT |
| 4B015-478AN | HALOGEN LAMP SOCKET UNITHALOGEN LAMP SOCKET UNIT |
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